专利名称：Production method of optical element
retainer, tube, exposure device, and device 发明人：柴崎 祐一
申请号：JP2005516519
申请日：20041222
公开号：JPWO2005062100A1
公开日：
20071213
专利内容由知识产权出版社提供
笹原りむ摘要： As adjusting the attitude of the optical element finely it is possible, the optical element retainer which can maintain the airtightness inside high is offered. The optical element retainer, is provided inside the framework component (41) and the said framework component, has with the lens frame body which keeps the optical element. The displacement module (82) which is provided in the framework component, through the lens frame body, adjusts the position of the optical element. The O ring (88,90), is provided with displacement module and the framework component.
申请人：株式会社ニコン
地址：東京都千代田区丸の内３丁目２番３号
国籍：JP
代理人：恩田 博宣，恩田 誠
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