专利名称：Metal polishing agent and process for polishing metal using same
发明人：Takashima, Masayuki,Sawara,
Kenichi,Sukumoda, Atsushi
申请号：EP98122108.8
申请日：19981123
公开号：EP0919602A1
公开日：
19990602
专利内容由知识产权出版社提供
摘要：There is provided a metal polishing agent comprising an aqueous emulsion comprising a complexing agent capable of reacting with a metal to form a water soluble metal complex and a resin particle prepared by emulsion polymerization of a vinyl compound, which is particularly useful for polishing a metal film formed on a silicon wafer by a chemical and mechanical polishing.
申请人：Sumitomo Chemical Company, Limited
soojoo地址：5-33, Kitahama 4-chome Chuo-ku Osaka 541-8550 JP
国籍：JP
代理机构：VOSSIUS & PARTNER
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