[1] K. Zhang et al., “Piezoresistive MEMS Pressure Sensor for Automotive Airbag Control,” in 27th IEEE International Conference on Micro Electro Mechanical Systems (IEEE-MEMS 2014), San Francisco, CA, USA, Jan. 2014, pp. 344-347.
[2] W. C. Jin, S. P. Xie, and S. M. Ni, “Design of Piezoelectric MEMS Accelerometer,” in Proceedings of the 3rd International Symposium on Micro-NanoMechatronics and Human Science, Nagoya, Japan, Nov. 2001, pp. 41-48.
参考文献的格式[3] J. M. Rabaey, A. P. Chandrakasan, and B. Nikolic, Digital Integrated Circuits: A Design Perspective, 2nd ed. Upper Saddle River, NJ: Prentice Hall, 2003, pp. 18–26.
[4] C. K. Tang and J. Y. Wang, “MEMS Accelerometer Design based on Signal Extraction Technique,” IEEE Trans. on Instrumentation and Measurement, vol. 50, no. 6, pp. 1767–1773, Dec. 2001.
[5] G. K. Fedder and M. M. Tentzeris, “High-frequency Modeling of MEMS Devices and Circui
ts,” IEEE Trans. on Microwave Theory and Techniques, vol. 50, pp. 909–918, Mar. 2002.
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